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PM
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99d939492e
1.加登出界面
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9 mesi fa |
TM
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3aee4d6673
1. Add the function of StatsDataManager in UI,RT
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9 mesi fa |
ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 anno fa |
DBModel.sql
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f814cf53a8
1.Add simulator read RF ConfigType function
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11 mesi fa |
DESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 mesi fa |
DataGroup.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 anno fa |
DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 anni fa |
EquipmentVariables.xml
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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10 mesi fa |
EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 anni fa |
IoProviderConfig.xml
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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10 mesi fa |
LogDefine.json
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99d939492e
1.加登出界面
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9 mesi fa |
RecipeFormat.xml
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9760d40cf7
port simulator
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2 anni fa |
SESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 mesi fa |
SVID.xls
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25954d684c
update EquipmentVariables.xml and Secsgem dll
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10 mesi fa |
SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 anno fa |
SignalTower.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 anno fa |
System.sccfg
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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10 mesi fa |
System_Kepler2200.sccfg
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0af5bc1e75
throughput enhancement.
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9 mesi fa |
System_Kepler2300.sccfg
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0af5bc1e75
throughput enhancement.
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9 mesi fa |
System_VenusDE.sccfg
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3b9c2c346d
1. add missing item in SE/DE Sccfg
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9 mesi fa |
System_VenusSE.sccfg
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3b9c2c346d
1. add missing item in SE/DE Sccfg
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9 mesi fa |
VenusPreProcess.py
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64c7ef574e
log
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2 anni fa |
VenusSignalTower.xml
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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10 mesi fa |