| .. |
|
PM
|
99d939492e
1.加登出界面
|
vor 9 Monaten |
|
TM
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
vor 9 Monaten |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
vor 1 Jahr |
|
DBModel.sql
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
vor 11 Monaten |
|
DESequenceFormat.xml
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
vor 10 Monaten |
|
DataGroup.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
vor 1 Jahr |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
vor 2 Jahren |
|
EquipmentVariables.xml
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
vor 10 Monaten |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
vor 2 Jahren |
|
IoProviderConfig.xml
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
vor 10 Monaten |
|
LogDefine.json
|
99d939492e
1.加登出界面
|
vor 9 Monaten |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
vor 2 Jahren |
|
SESequenceFormat.xml
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
vor 10 Monaten |
|
SVID.xls
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
vor 10 Monaten |
|
SequenceFormat.xml
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
vor 1 Jahr |
|
SignalTower.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
vor 1 Jahr |
|
System.sccfg
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
vor 10 Monaten |
|
System_Kepler2200.sccfg
|
0af5bc1e75
throughput enhancement.
|
vor 9 Monaten |
|
System_Kepler2300.sccfg
|
0af5bc1e75
throughput enhancement.
|
vor 9 Monaten |
|
System_VenusDE.sccfg
|
3b9c2c346d
1. add missing item in SE/DE Sccfg
|
vor 9 Monaten |
|
System_VenusSE.sccfg
|
3b9c2c346d
1. add missing item in SE/DE Sccfg
|
vor 9 Monaten |
|
VenusPreProcess.py
|
64c7ef574e
log
|
vor 2 Jahren |
|
VenusSignalTower.xml
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
|
vor 10 Monaten |
zhouhr
3b9c2c346d
1. add missing item in SE/DE Sccfg