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MFControlPressureRoutine.cs
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 years ago |
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MFHomeRoutine.cs
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
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MFLeakCheckRoutine.cs
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b6acfe2e29
优化TM leak check功能
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2 years ago |
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MFPMExtendRoutine.cs
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072e5d0d01
ui Module TM 名变TMRobot
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2 years ago |
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MFPMPickRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPMPlaceRoutine.cs
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
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MFPMRetractRoutine.cs
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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2 years ago |
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MFPMSwapRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPickRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPlaceRoutine.cs
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8f9b95ae8f
Develop transfer cycle.
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2 years ago |
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MFPumpRoutine.cs
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038e0b984a
1.Add LL pump preemptive lock
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2 years ago |
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MFPurgeRoutine.cs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
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MFSwapRoutine.cs
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8020492bf4
fix action list buffer not reset while swap wafer.
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2 years ago |
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MFVentRoutine.cs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
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TMEntity.cs
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f11765e064
Add TMHome abort
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2 years ago |
lixiang
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能