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EFEM
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60e9a04892
Simulator LP3 Update
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2 years ago |
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EPD
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4ffafb6001
EFEM界面优化
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2 years ago |
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EPDs
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4ffafb6001
EFEM界面优化
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2 years ago |
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IODevices
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2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
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2 years ago |
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TM
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
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AIRSYSChiller.cs
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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AdTecRF.cs
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4992e94a4e
代码提交
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2 years ago |
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AdixenTurboPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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CometRF.cs
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4ffafb6001
EFEM界面优化
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2 years ago |
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DataDefine.cs
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f211c4242f
Efem module raw design.
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2 years ago |
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DeviceManager.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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2 years ago |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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FinsPlc.cs
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2b930e56b9
Log output for exception.
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2 years ago |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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2 years ago |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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2 years ago |
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JetKepler2200APM.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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JetKepler2300PM.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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JetPMBase.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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JetVenusPM.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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PendulumValve.cs
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4992e94a4e
代码提交
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2 years ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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SMCChiller.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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SkyPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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VirgoSignalTower.cs
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
sangwq
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.