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IoBacksideHe.cs
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2bcfec21f1
修改以兼容kepler2300 recipe 修改recipe界面中chuck dechuck出现的时机 补充选项中的空值
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2 years ago |
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IoCylinder.cs
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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2 years ago |
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IoGasStick.cs
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
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IoHeartbeat.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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IoHeater.cs
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c5abe7c813
Simulator Communication Port Update
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2 years ago |
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IoLid.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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IoMfc.cs
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dbf06a2134
添加TM Operation界面
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2 years ago |
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IoPressureControl.cs
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1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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2 years ago |
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IoPressureMeter.cs
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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IoSignalLight.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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IoSignalTower.cs
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f211c4242f
Efem module raw design.
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2 years ago |
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IoSwitch.cs
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8f80478982
1.添加IoSwitch
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2 years ago |
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IoTMPressureCtl.cs
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b6acfe2e29
优化TM leak check功能
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2 years ago |
zhouhr
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity