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EFEM
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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il y a 1 an |
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EPD
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4ffafb6001
EFEM界面优化
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il y a 1 an |
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EPDs
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4ffafb6001
EFEM界面优化
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il y a 1 an |
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IODevices
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de2f4fea7e
优化abort下拉功能
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il y a 1 an |
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PreAligner
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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il y a 1 an |
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TM
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0ed42d17d1
fix bugs for WaferOffset
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il y a 1 an |
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VCE
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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il y a 1 an |
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AIRSYSChiller.cs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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il y a 1 an |
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AdTecRF.cs
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3f6c65223f
1.删除部分不需要插入数据库数据
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il y a 1 an |
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AdixenTurboPump.cs
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171eef8acc
Add to chart@@to slot switch page function
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il y a 1 an |
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CometRF.cs
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20cc441578
1.kepler2200 ui优化
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il y a 1 an |
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DataDefine.cs
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f211c4242f
Efem module raw design.
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il y a 2 ans |
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DeviceManager.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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il y a 1 an |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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il y a 1 an |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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il y a 1 an |
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FinsPlc.cs
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2b930e56b9
Log output for exception.
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il y a 2 ans |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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il y a 1 an |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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il y a 2 ans |
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JetKepler2200APM.cs
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de2f4fea7e
优化abort下拉功能
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il y a 1 an |
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JetKepler2300PM.cs
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b1e6a9ce63
bug提交
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il y a 1 an |
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JetPMBase.cs
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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il y a 1 an |
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JetVenusPM.cs
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b1e6a9ce63
bug提交
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il y a 1 an |
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JetVenusSEPM.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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il y a 1 an |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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il y a 1 an |
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PendulumValve.cs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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il y a 1 an |
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PlasmaController.cs
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75710d35d8
RF Match.
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il y a 2 ans |
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SMCChiller.cs
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20cc441578
1.kepler2200 ui优化
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il y a 1 an |
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SkyPump.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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il y a 1 an |
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VirgoSignalTower.cs
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bdec2c0d74
1.修改TM robot模拟器
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il y a 1 an |
zhouhr
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug