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UILayout.xml
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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hai 1 ano |
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_ioDefineKepler2200A.xml
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68b4ba9640
1.添加mtorr与Pa切换功能
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hai 1 ano |
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_ioDefineKepler2200B.xml
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68b4ba9640
1.添加mtorr与Pa切换功能
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hai 1 ano |
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_ioDefineKepler2300.xml
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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%!s(int64=2) %!d(string=hai) anos |
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_ioDefineVenusDE.xml
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b3a13fc6c7
1.IoMagnet device Logical supplement
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hai 1 ano |
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_ioDefineVenusSE.xml
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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hai 1 ano |
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_ioDefineVenusSE_MF.xml
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7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
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hai 1 ano |
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_ioDefineVenus_MF.xml
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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hai 1 ano |
hecl
b3a13fc6c7
1.IoMagnet device Logical supplement