| .. |
|
EFEM
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
il y a 1 an |
|
LLs
|
6d393bb86d
new routing algorithm with prediction.
|
il y a 1 an |
|
LPs
|
8bb5f3f4f9
fixed loadport event notify;
|
il y a 1 an |
|
PMs
|
9d28f8ee7d
1.Add Tru match
|
il y a 1 an |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
il y a 1 an |
|
Schedulers
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
il y a 1 an |
|
TM
|
8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
|
il y a 1 an |
|
VCE
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
il y a 1 an |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
il y a 1 an |
|
Autotransfer_LP_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
il y a 1 an |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
il y a 1 an |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
il y a 2 ans |
|
ManualTransfer.cs
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
il y a 1 an |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
il y a 1 an |
|
RouteManager.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
il y a 1 an |
|
SEManualTransfer.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
il y a 1 an |
|
SETMCycle.cs
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
il y a 1 an |
|
SystemDispatcher.cs
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
il y a 1 an |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
sangwq
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.