ManualTransfer.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. public class ManualTransfer : IRoutine
  25. {
  26. SchedulerTMRobot _tmRobot = (SchedulerTMRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot);
  27. SchedulerEfemRobot _efemRobot = (SchedulerEfemRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot);
  28. private Queue<MoveItem> _moveTaskQueue = new Queue<MoveItem>();
  29. private MoveItem _move_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  30. private MoveItem _current_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  31. private Guid _wafer_id;
  32. private R_TRIG _wafer_arrive_trig = new R_TRIG();
  33. private MovingStatus _moving_status = MovingStatus.Idle;
  34. private int _tmRobotSingleArmOption = 0;
  35. private int _efemRobotSingleArmOption = 0;
  36. public ManualTransfer()
  37. {
  38. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  39. _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
  40. }
  41. public RState Start(params object[] objs)
  42. {
  43. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  44. _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
  45. // rounding the single arm option
  46. if (_tmRobotSingleArmOption > 2)
  47. _tmRobotSingleArmOption = 0;
  48. if (_efemRobotSingleArmOption > 2)
  49. _efemRobotSingleArmOption = 0;
  50. // RESET
  51. _moveTaskQueue.Clear();
  52. _moving_status = MovingStatus.Idle;
  53. _wafer_arrive_trig.RST = true ;
  54. _move_item.SourceModule = (ModuleName)objs[0];
  55. _move_item.SourceSlot = (int)objs[1];
  56. _move_item.DestinationModule = (ModuleName)objs[2];
  57. _move_item.DestinationSlot = (int)objs[3];
  58. _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;
  59. if (!CheckSingleArmOption(_move_item.DestinationModule, _move_item.DestinationSlot))
  60. return RState.Failed;
  61. if (!CheckSingleArmOption(_move_item.SourceModule, _move_item.SourceSlot))
  62. return RState.Failed;
  63. if (IsCrossTransfer(_move_item))
  64. {
  65. var slot = SelectLLFreeSlot();
  66. if (slot.Module == ModuleName.System)
  67. return RState.Failed;
  68. // vac to atm
  69. if (ModuleHelper.IsPm(_move_item.SourceModule) || ModuleHelper.IsTMRobot(_move_item.SourceModule))
  70. {
  71. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, Hand.Blade1));
  72. if(ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  73. {
  74. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  75. }
  76. else
  77. {
  78. Hand hand = SelectEfemRobotFreeHand();
  79. if(hand == Hand.None)
  80. {
  81. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  82. return RState.Failed;
  83. }
  84. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, ModuleName.EfemRobot, (int)hand, hand));
  85. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  86. }
  87. }
  88. // atm to vac
  89. else
  90. {
  91. if (ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  92. {
  93. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, (Hand)_move_item.SourceSlot));
  94. }
  95. else
  96. {
  97. Hand hand = SelectEfemRobotFreeHand();
  98. if (hand == Hand.None)
  99. {
  100. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  101. return RState.Failed;
  102. }
  103. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  104. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, slot.Module, slot.Slot, hand));
  105. }
  106. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, Hand.Blade1));
  107. }
  108. }
  109. else if(IsVacTransfer(_move_item))
  110. {
  111. _moveTaskQueue.Enqueue(_move_item);
  112. }
  113. else // atm transfer
  114. {
  115. if(ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  116. {
  117. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.SourceSlot));
  118. }
  119. else if (ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  120. {
  121. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  122. }
  123. else
  124. {
  125. Hand hand = SelectEfemRobotFreeHand();
  126. if (hand == Hand.None)
  127. {
  128. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  129. return RState.Failed;
  130. }
  131. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  132. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  133. }
  134. }
  135. _current_item = _moveTaskQueue.Dequeue();
  136. _moving_status = MovingStatus.Waiting;
  137. return RState.Running;
  138. }
  139. public RState Monitor()
  140. {
  141. return MoveWaferForward();
  142. }
  143. public void Abort()
  144. {
  145. }
  146. public void Clear()
  147. {
  148. _moveTaskQueue.Clear();
  149. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  150. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  151. }
  152. private RState MoveWaferForward()
  153. {
  154. switch(_moving_status)
  155. {
  156. case MovingStatus.Waiting:
  157. {
  158. if(IsCurrentModuleReady())
  159. {
  160. // Post current item
  161. if(IsVacTransfer(_current_item))
  162. {
  163. _tmRobot.PostMoveItems(new MoveItem[1] { _current_item });
  164. }
  165. else
  166. {
  167. _efemRobot.PostMoveItems(new MoveItem[1] { _current_item });
  168. }
  169. _moving_status = MovingStatus.Moving;
  170. }
  171. }
  172. break;
  173. case MovingStatus.Moving:
  174. {
  175. _wafer_arrive_trig.CLK = IsArriveCurrentTarget();
  176. if (_wafer_arrive_trig.Q)
  177. {
  178. _moving_status = MovingStatus.Idle;
  179. }
  180. }
  181. break;
  182. case MovingStatus.Idle:
  183. {
  184. if(IsCurrentModuleReady())
  185. {
  186. if(_moveTaskQueue.Count > 0)
  187. {
  188. _current_item = _moveTaskQueue.Dequeue();
  189. _moving_status = MovingStatus.Waiting;
  190. }
  191. }
  192. break;
  193. }
  194. }
  195. return TransferStatus();
  196. }
  197. private bool IsVacTransfer(MoveItem item)
  198. {
  199. return ModuleHelper.IsPm(item.SourceModule) ||
  200. ModuleHelper.IsTMRobot(item.SourceModule) ||
  201. ModuleHelper.IsPm(item.DestinationModule) ||
  202. ModuleHelper.IsTMRobot(item.DestinationModule);
  203. }
  204. private bool IsCrossTransfer(MoveItem item)
  205. {
  206. if (ModuleHelper.IsLoadLock(item.DestinationModule) || ModuleHelper.IsLoadLock(item.SourceModule))
  207. return false;
  208. if (((ModuleHelper.IsPm(item.SourceModule) || ModuleHelper.IsTMRobot(item.SourceModule)) &&
  209. !ModuleHelper.IsPm(item.DestinationModule) && !ModuleHelper.IsTMRobot(item.DestinationModule)) ||
  210. ((ModuleHelper.IsPm(item.DestinationModule) || ModuleHelper.IsTMRobot(item.DestinationModule)) &&
  211. !ModuleHelper.IsPm(item.SourceModule) && !ModuleHelper.IsTMRobot(item.SourceModule)))
  212. return true;
  213. return false;
  214. }
  215. private bool IsArriveCurrentTarget()
  216. {
  217. var wafer = WaferManager.Instance.GetWafer(_current_item.DestinationModule, _current_item.DestinationSlot);
  218. return !wafer.IsEmpty && wafer.InnerId == _wafer_id;
  219. }
  220. private bool IsCurrentModuleReady()
  221. {
  222. return (IsVacTransfer(_current_item) ? _tmRobot.IsAvailable : _efemRobot.IsAvailable) &&
  223. _isModuleReady(_current_item.SourceModule) &&
  224. _isModuleReady(_current_item.DestinationModule);
  225. }
  226. private bool IsTransferError()
  227. {
  228. return (IsVacTransfer(_current_item) ? _tmRobot.IsError : _efemRobot.IsError) ||
  229. _isModuleError(_current_item.SourceModule) ||
  230. _isModuleError(_current_item.DestinationModule);
  231. }
  232. private bool _isModuleReady(ModuleName module)
  233. {
  234. return Singleton<TransferModule>.Instance.GetScheduler(module).IsAvailable;
  235. }
  236. private bool _isModuleError(ModuleName module)
  237. {
  238. return Singleton<TransferModule>.Instance.GetScheduler(module).IsError;
  239. }
  240. private Hand SelectEfemRobotFreeHand()
  241. {
  242. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  243. return Hand.Blade1;
  244. else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  245. return Hand.Blade2;
  246. else
  247. return Hand.None;
  248. }
  249. private SlotItem SelectLLFreeSlot()
  250. {
  251. foreach(var ll in new ModuleName[2] { ModuleName.LLA, ModuleName.LLB})
  252. {
  253. if (ModuleHelper.IsInstalled(ll) && _isModuleReady(ll))
  254. {
  255. for (int i = 0; i < 4; i++)
  256. {
  257. if (WaferManager.Instance.CheckNoWafer(ll, i))
  258. return new SlotItem(ll, i);
  259. }
  260. }
  261. }
  262. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, "Cannot move wafer as no valid Loadlock slot");
  263. return new SlotItem(ModuleName.System, -1);
  264. }
  265. private RState TransferStatus()
  266. {
  267. if (IsTransferError())
  268. return RState.Failed;
  269. if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)
  270. return RState.End;
  271. return RState.Running;
  272. }
  273. private bool CheckSingleArmOption(ModuleName robot, int slot)
  274. {
  275. if(ModuleHelper.IsTMRobot(robot))
  276. {
  277. if (_tmRobotSingleArmOption != 0 && _tmRobotSingleArmOption != slot + 1)
  278. {
  279. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"Cannot move the wafer as TM Robot {(Hand)slot} is disabled.");
  280. return false;
  281. }
  282. }
  283. else if(ModuleHelper.IsEFEMRobot(robot))
  284. {
  285. if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != slot + 1)
  286. {
  287. LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"Cannot move the wafer as EFEM Robot {(Hand)slot} is disabled.");
  288. return false;
  289. }
  290. }
  291. return true;
  292. }
  293. public int GetSingleArmOption(ModuleName robot)
  294. {
  295. return ModuleHelper.IsTMRobot(robot) ? _tmRobotSingleArmOption : _efemRobotSingleArmOption;
  296. }
  297. }
  298. public class ReturnAllWafer : IRoutine
  299. {
  300. private List<ModuleName> _moduleList = new List<ModuleName> { ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner, ModuleName.LLA, ModuleName.LLB, ModuleName.TMRobot, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD };
  301. private ManualTransfer _manualTransfer;
  302. private Queue<MoveItem> _returnTaskQueue = new Queue<MoveItem>();
  303. private MoveItem _current_item;
  304. public ReturnAllWafer(ManualTransfer manualTransfer)
  305. {
  306. _manualTransfer = manualTransfer;
  307. }
  308. public RState Start(params object[] objs)
  309. {
  310. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  311. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  312. foreach(var mod in _moduleList)
  313. {
  314. if (ModuleHelper.IsInstalled(mod) && Singleton<TransferModule>.Instance.GetScheduler(mod).IsAvailable)
  315. {
  316. if (ModuleHelper.IsEFEMRobot(mod) || ModuleHelper.IsTMRobot(mod))
  317. {
  318. if (_manualTransfer.GetSingleArmOption(mod) != 2)
  319. PushWaferToReturnQueqe(mod, 0);
  320. if (_manualTransfer.GetSingleArmOption(mod) != 1)
  321. PushWaferToReturnQueqe(mod, 1);
  322. }
  323. else if (ModuleHelper.IsLoadLock(mod))
  324. {
  325. int nSlotNumber = SC.GetValue<int>($"{mod}.SlotNumber");
  326. for (int i = 0; i < nSlotNumber; i++)
  327. {
  328. PushWaferToReturnQueqe(mod, i);
  329. }
  330. }
  331. else
  332. {
  333. PushWaferToReturnQueqe(mod, 0);
  334. }
  335. }
  336. }
  337. if (_returnTaskQueue.Count == 0)
  338. return RState.Failed;
  339. _current_item = _returnTaskQueue.Dequeue();
  340. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  341. return RState.Running;
  342. }
  343. public RState Monitor()
  344. {
  345. var ret = _manualTransfer.Monitor();
  346. if (ret == RState.End)
  347. {
  348. if (_returnTaskQueue.Count > 0)
  349. {
  350. _current_item = _returnTaskQueue.Dequeue();
  351. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  352. }
  353. else
  354. return RState.End;
  355. }
  356. else if (ret == RState.Failed || ret == RState.Timeout)
  357. {
  358. LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System,"Manual Transfer", $"Return Wafer {_current_item.SourceModule}{_current_item.SourceSlot} failed");
  359. return RState.Failed;
  360. }
  361. return RState.Running;
  362. }
  363. public void Abort()
  364. {
  365. }
  366. public void Clear()
  367. {
  368. _returnTaskQueue.Clear();
  369. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  370. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  371. }
  372. private void PushWaferToReturnQueqe(ModuleName mod, int nSlot)
  373. {
  374. var wafer = WaferManager.Instance.GetWafer(mod, nSlot);
  375. if (!wafer.IsEmpty)
  376. {
  377. _returnTaskQueue.Enqueue(new MoveItem(mod, nSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, Hand.Blade1));
  378. }
  379. }
  380. }
  381. }