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Attributes
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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Properties
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8582fd7e94
Venus初始版本提交
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3 years ago |
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Chamber.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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ConfigType.cs
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f09d7d1b15
分开所有系列配置文件
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1 year ago |
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ConvertPressureUnit.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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DataName.cs
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3cad102221
更新 RT
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3 years ago |
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DeviceName.cs
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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EventDefine.cs
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a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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1 year ago |
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FADefine.cs
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3cad102221
更新 RT
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3 years ago |
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GlobalEvents.cs
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ba61077913
增加拖片功能
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2 years ago |
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HighTemperatureHeaterPosition.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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InvokeName.cs
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3cad102221
更新 RT
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3 years ago |
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Kepler2300Device.cs
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a5813eb09d
1.修改chamber wafer样式
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2 years ago |
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MFCCalibrationData.cs
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3a078d515d
1.修复ui灯闪烁错误bug
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2 years ago |
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ModuleName.cs
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3cad102221
更新 RT
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3 years ago |
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PMLeakCheckResult.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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PartialPressureResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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PressureType.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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ProcessUnitDefine.cs
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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Recipe.cs
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1929a3510b
1.新版ui界面开发
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1 year ago |
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RecipeResult.cs
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bcc9d2faf8
1、Chamber add the waferID
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2 years ago |
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RecipeToleranceChecker.cs
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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RobotArmPan.cs
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b2e38c8ff3
Add unuploaded files
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2 years ago |
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RtState.cs
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9d9b666ea4
Venus SE Update
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1 year ago |
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SCValue.cs
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3cad102221
更新 RT
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3 years ago |
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SerializeHelper.cs
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8d21b41b42
AutoCycle enhancement.
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2 years ago |
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SignalTowerItem.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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StepItem.cs
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edb5ad6960
1.添加数据分析 Recipe step功能
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2 years ago |
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SubItem.cs
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bb33e89998
1，优化UI界面
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2 years ago |
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TM.cs
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dfc9174ac8
VenusSE TM PM Simulator Update
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2 years ago |
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VATPerformanceResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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ValveType.cs
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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VenusDevice.cs
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
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VenusMenu.cs
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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2 years ago |
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Venus_Core.csproj
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f09d7d1b15
分开所有系列配置文件
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1 year ago |
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VirgoDevice.cs
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9760d40cf7
port simulator
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3 years ago |
