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IoBacksideHe.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 anno fa |
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IoCylinder.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 mesi fa |
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IoGasStick.cs
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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11 mesi fa |
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IoHeartbeat.cs
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9faf7dc26a
拉取代码软件报警，去除默认Aligner1
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11 mesi fa |
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IoHeater.cs
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552d60ca99
1.Stable与Tolerance 功能优化
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1 anno fa |
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IoHighTemperatureHeater.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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11 mesi fa |
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IoHongHuControl.cs
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 mesi fa |
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IoLid.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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1 anno fa |
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IoMagnet.cs
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e2836bfbda
1.Chamber DE process enhance
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11 mesi fa |
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IoMfc.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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11 mesi fa |
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IoPressureControl.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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11 mesi fa |
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IoPressureMeter.cs
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9163903164
Kepler2200优化
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11 mesi fa |
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IoSignalLight.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 anni fa |
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IoSignalTower.cs
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f211c4242f
Efem module raw design.
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1 anno fa |
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IoSwitch.cs
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8f80478982
1.添加IoSwitch
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1 anno fa |
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IoTMPressureCtl.cs
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 anno fa |
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IoTMSEPressureCtl.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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1 anno fa |
lixiang
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check