| .. |
|
PM
|
31019683d7
1.Venus MFCVerification UI enhance
|
10 months ago |
|
TM
|
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
|
10 months ago |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
1 year ago |
|
DBModel.sql
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
|
DESequenceFormat.xml
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 months ago |
|
DataGroup.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
1 year ago |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
EquipmentVariables.xml
|
7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
|
1 year ago |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
2 years ago |
|
IoProviderConfig.xml
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
10 months ago |
|
LogDefine.json
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 months ago |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
2 years ago |
|
SESequenceFormat.xml
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 months ago |
|
SVID.xls
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 year ago |
|
SequenceFormat.xml
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 year ago |
|
SignalTower.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
1 year ago |
|
System.sccfg
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 months ago |
|
System_Kepler2200.sccfg
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
11 months ago |
|
System_Kepler2300.sccfg
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
1 year ago |
|
System_VenusDE.sccfg
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 months ago |
|
System_VenusSE.sccfg
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
|
10 months ago |
|
VenusPreProcess.py
|
64c7ef574e
log
|
2 years ago |
zhouhr
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis