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PM
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31019683d7
1.Venus MFCVerification UI enhance
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vor 10 Monaten |
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TM
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4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis
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vor 10 Monaten |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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vor 1 Jahr |
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DBModel.sql
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f814cf53a8
1.Add simulator read RF ConfigType function
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vor 1 Jahr |
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DESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
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DataGroup.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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vor 1 Jahr |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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vor 2 Jahren |
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EquipmentVariables.xml
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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vor 1 Jahr |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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vor 2 Jahren |
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IoProviderConfig.xml
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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vor 10 Monaten |
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LogDefine.json
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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vor 10 Monaten |
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RecipeFormat.xml
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9760d40cf7
port simulator
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vor 2 Jahren |
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SESequenceFormat.xml
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
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SVID.xls
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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vor 1 Jahr |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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vor 1 Jahr |
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SignalTower.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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vor 1 Jahr |
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System.sccfg
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
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System_Kepler2200.sccfg
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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vor 11 Monaten |
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System_Kepler2300.sccfg
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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vor 1 Jahr |
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System_VenusDE.sccfg
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
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System_VenusSE.sccfg
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
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VenusPreProcess.py
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64c7ef574e
log
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vor 2 Jahren |
zhouhr
4e783f1934
fix the bug in Pendulum Valve for FullRangePressure && fix the bug of Pump/Vent in VenusSE && add check before VCE move in z-axis