 sangwq
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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9 maanden geleden |
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sangwq
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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11 maanden geleden |
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sangwq
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501997ac38
TM/EFEM robot single arm option.
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1 jaar geleden |
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sangwq
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9ba5d70aff
fix abort manual transfer bug.
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1 jaar geleden |
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sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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1 jaar geleden |
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sangwq
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f216c69fcf
Enhance AutoCycle Module.
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1 jaar geleden |
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sangwq
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c223835b1e
enhance AutoCycle module.
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1 jaar geleden |
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sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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1 jaar geleden |
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sangwq
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6a29fad5f9
update for unload/PMleakcheck bugs
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1 jaar geleden |
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sangwq
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ff17e9c447
develop autycylce/manualmove module.
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1 jaar geleden |
