lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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4 months ago |
lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID,Process History 切recipe 保留原查询信息
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5 months ago |
chenkui
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据;
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1 year ago |
chenkui
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63d58afa42
1、SecsGem增加了UTF-8编码的支持;
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1 year ago |
chenkui
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5740a76224
1、ControlJobInfo类增加了SequenceNameList,解决LoadPort UI中Sequence显示问题
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1 year ago |
chenkui
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4359bcf776
1、修复了AbortJob无法选择Sequence的问题
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1 year ago |
chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
chenkui
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a3f01b0830
1、重新引用最新版本的SecsGem动态库,用于实现FA相应的功能;
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1 year ago |
sangwq
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20606c1ffb
check in new routing algorithm code.
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1 year ago |
lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能,c1/c2小于offset不设置
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1 year ago |
sangwq
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
sangwq
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
sangwq
|
6745f225c7
enhance the throughput calculation.
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1 year ago |
sangwq
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
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1 year ago |
sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 year ago |
sangwq
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694c2524ad
enhance the pause function and fix the atm prepare pressure bugs.
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1 year ago |
lixiang
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410df462f5
从AutoCycle获取已经运行job做Pause功能
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1 year ago |
sangwq
|
02efc78270
fix the WTWClean bug while PM Swap wafer.
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1 year ago |
sangwq
|
dbb753dd44
Pause functionality.
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1 year ago |
sangwq
|
a80b5af3fd
enhance manual return wafer algorithm.
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1 year ago |
sangwq
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ec2f97e62d
enhance log.
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1 year ago |
sangwq
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6ac9eafd1d
FIX minor bug for log.
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1 year ago |
sangwq
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
sangwq
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faa496c2b0
fix a routing bug for single PM sequence.
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1 year ago |
sangwq
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88b91b4ea3
fix routing bugs.
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1 year ago |
sangwq
|
19499bd319
fix a routing bug.
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1 year ago |
sangwq
|
0e0a0459a5
fix the slot exceeds limit bug.
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1 year ago |
sangwq
|
73f0d306a7
Enhance routing algorithm.
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1 year ago |
sangwq
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22c9fb9a5c
Fixed the routing path blocked bug.
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1 year ago |
sangwq
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4a783d7213
发现 (_atmMoveFinishTrig.Q) 未能捕捉到问题, 暂时没发现原因, 更改实现算法。
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1 year ago |