 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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10 months ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
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11 months ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
 Intern01
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dfc9174ac8
VenusSE TM PM Simulator Update
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1 year ago |
 sangwq
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9144014f90
enhance the routing algorithm and module online/offline control logic.
|
1 year ago |
|
lixiang
|
e0817cb012
现场bug修改
|
1 year ago |
 zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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1 year ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
1 year ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
1 year ago |
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sangwq
|
344d734fff
ATM Transfer.
|
1 year ago |
|
Intern01
|
f845cd22f1
TMInterlock Update
|
1 year ago |
|
Intern01
|
ca4aebf454
LoadLock Left&Right UI Update
|
1 year ago |
|
Intern01
|
6d76a4b7ac
TM IO UPDATE
|
1 year ago |
|
Intern01
|
2950d1e981
TM IO配置更新
|
1 year ago |
|
Intern01
|
265a3b67bc
TMInterlock update
|
1 year ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
1 year ago |
