 sangwq
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72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
11 months ago |
 lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
|
1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
1 year ago |
 kuangzl
|
cfd9253e8a
Modified the style of the venusDE page and added the DERobot movement.
|
1 year ago |
 zhouhr
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eff7f8a03e
upload missing files
|
1 year ago |
|
zhouhr
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
1 year ago |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 year ago |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 year ago |
|
lixiang
|
9163903164
Kepler2200优化
|
1 year ago |
|
zhouhr
|
cc04adb731
change the location of the PA from VPA to Aligner1
|
1 year ago |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
1 year ago |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 year ago |
 hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 year ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
1 year ago |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 year ago |
|
hecl
|
0a2d5ac547
Venus DE TM simulator add
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 year ago |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 year ago |
