 hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
преди 1 година |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
преди 1 година |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
преди 1 година |
 lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
преди 1 година |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
преди 1 година |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
|
преди 1 година |
|
zhouhr
|
57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
|
преди 1 година |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
преди 1 година |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
преди 1 година |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
|
преди 1 година |
|
zhouhr
|
bcbe6b2cbe
fix bug in PM SlitDoorClosed
|
преди 1 година |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
преди 1 година |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
преди 1 година |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
преди 1 година |
|
zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
преди 1 година |
