 lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
 hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 months ago |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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11 months ago |
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lixiang
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c671c999c0
ui界面优化
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11 months ago |
|
lixiang
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 months ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
|
hecl
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996eacc709
VenusDE recipe tolerance enhance
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11 months ago |
|
lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
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lixiang
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07b8ea7e19
让fdc只支持Process Type
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1 year ago |
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lixiang
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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lixiang
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17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
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1 year ago |
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lixiang
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4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
 chenkui
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563a30f852
1、add recipe event notify;
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
|
lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
|
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
hecl
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db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
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1 year ago |
|
hecl
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2aa8eecc79
Enhancement of PMProcessRoutine recipe processing flow
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1 year ago |
|
lixiang
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fd2d6f9a5c
解决冲突
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1 year ago |
|
hecl
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091efd8f64
1.enhance PMdataRecord about waferstatus update
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1 year ago |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
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1 year ago |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
