 sangwq
|
f8336dc16b
fix the crash issue in SETMScheduler.
|
11 月之前 |
|
sangwq
|
bcbd783654
avoid crash issue for temporary fix.
|
11 月之前 |
|
sangwq
|
75b6c4548e
submit new venus routing algorithm.
|
11 月之前 |
 lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 月之前 |
 zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 月之前 |
|
lixiang
|
34958e5963
swap 压差计算log测试
|
11 月之前 |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
|
11 月之前 |
|
lixiang
|
9e9459c927
efem界面按钮功能优化
|
11 月之前 |
|
lixiang
|
5a4c70257b
1.Recipe 添加给eap recipe的内容
|
11 月之前 |
|
lixiang
|
c671c999c0
ui界面优化
|
1 年之前 |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
1 年之前 |
 hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
1 年之前 |
|
sangwq
|
1ff7394c30
Fix the ATM cycle blocking bug.
|
1 年之前 |
|
sangwq
|
03770198be
Skip auto Vent/pump while ATM mode.
|
1 年之前 |
|
sangwq
|
5d9198550f
Enhance the throughput with align sequence.
|
1 年之前 |
|
zhouhr
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
1 年之前 |
|
lixiang
|
ed7c537c19
1.添加TM/LLA/LLB 平衡阀
|
1 年之前 |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 年之前 |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
1 年之前 |
|
sangwq
|
54ed40c8b1
enhance kepler throughput
|
1 年之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 年之前 |
|
sangwq
|
82703d4497
enhance throughput with loadlock delay.
|
1 年之前 |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 年之前 |
|
hecl
|
0a2d5ac547
Venus DE TM simulator add
|
1 年之前 |
|
sangwq
|
57281fce55
Enhance throughput while not pass by aligner.
|
1 年之前 |
|
hecl
|
ca830385e4
Fix bug
|
1 年之前 |
|
hecl
|
996eacc709
VenusDE recipe tolerance enhance
|
1 年之前 |
|
zhouhr
|
13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
|
1 年之前 |
|
sangwq
|
f53fecc7bb
Enhance sequence aligner configurability
|
1 年之前 |
|
lixiang
|
7513d2e586
TM View 添加wafer
|
1 年之前 |
