 sangwq
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ec2f97e62d
enhance log.
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1 year ago |
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sangwq
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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2 years ago |
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sangwq
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d1ac5fa823
fixed the clean recipe path bug.
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2 years ago |
 lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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2 years ago |
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sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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2 years ago |
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sangwq
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7d93bf0076
Job Clean function, not finished.
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2 years ago |
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sangwq
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0a0308458e
Enable drag wafer while module offline.
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2 years ago |
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sangwq
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9144014f90
enhance the routing algorithm and module online/offline control logic.
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2 years ago |
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sangwq
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d49b8f65dd
fix the RouteManager instance initialize bug.
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2 years ago |
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sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 years ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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2 years ago |
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sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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sangwq
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b741650da1
TM Cycle ready.
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2 years ago |
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sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
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sangwq
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44ec74603f
TM Transfer
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
|
2 years ago |
