 sangwq
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dff905345f
增加PMB的兼容
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2 lat temu |
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sangwq
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66557b65bb
TMCycle not finished.
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2 lat temu |
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sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 lat temu |
 lixiang
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62f1a16025
1.添加PartialPressure界面
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2 lat temu |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 lat temu |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 lat temu |
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sangwq
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4ae8734407
PendulumValve pressure full range.
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2 lat temu |
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sangwq
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6187ad5b4f
Interlock 优化
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2 lat temu |
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lixiang
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a268651d10
1.添加configview和部分mfcverificationview
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2 lat temu |
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sangwq
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c4864f5546
debug gas verification.
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2 lat temu |
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sangwq
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 lat temu |
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lixiang
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b2c09224e9
代码合并
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2 lat temu |
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sangwq
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3222fa143a
Process module and Interlock .
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2 lat temu |
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sangwq
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0606b882bc
process module 1215
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2 lat temu |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 lat temu |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 lat temu |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 lat temu |
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lixiang
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782eafc783
1.添加log配置文件功能
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3 lat temu |
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sangwq
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9760d40cf7
port simulator
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3 lat temu |
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sangwq
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53e362a33e
update
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3 lat temu |
|
lixiang
|
a728a5bab5
添加修改配置文件功能模块
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3 lat temu |
