 zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
 lixiang
|
410df462f5
从AutoCycle获取已经运行job做Pause功能
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1 year ago |
|
lixiang
|
045de7f89c
RevetchMatch功能提交
|
1 year ago |
|
lixiang
|
c3f0679404
UI界面添加Pause/Resume功能
|
1 year ago |
 chenkui
|
8d61fa8827
去除了GlobalData全局变量
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
chenkui
|
31a961b749
update Secs-I dlls
|
1 year ago |
 hecl
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
1 year ago |
|
zhouhr
|
7fec2e1d8e
Enhance LOG Module && fix bug in SE UI.
|
1 year ago |
 sangwq
|
02efc78270
fix the WTWClean bug while PM Swap wafer.
|
1 year ago |
|
sangwq
|
dbb753dd44
Pause functionality.
|
1 year ago |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 year ago |
|
chenkui
|
0baedd2eb3
更新了Secs-I QueryAllSvids返回SmifData变量
|
1 year ago |
|
chenkui
|
3356cc0e74
增加了Secs-I的类库
|
1 year ago |
|
sangwq
|
a80b5af3fd
enhance manual return wafer algorithm.
|
1 year ago |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
zhouhr
|
cf4cf64edc
Optimize SEView.
|
1 year ago |
|
hecl
|
1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
1 year ago |
|
zhouhr
|
904ca94945
fix bug in VenusSE PM valve.
|
1 year ago |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
|
1 year ago |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 year ago |
|
zhouhr
|
bcbe6b2cbe
fix bug in PM SlitDoorClosed
|
1 year ago |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
sangwq
|
ec2f97e62d
enhance log.
|
1 year ago |
|
zhouhr
|
03aefe84d8
enhance configitem search
|
1 year ago |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
|
1 year ago |
|
zhouhr
|
26a6aa8f41
fix bug in SE Swap && SE Cycle
|
1 year ago |
