 zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 anni fa |
 Intern01
|
e2dc10679e
Solve conflict
|
2 anni fa |
|
Intern01
|
33f3e3a72e
1.complete parameters writing in pm routine
|
2 anni fa |
 lixiang
|
9c33424896
解决冲突
|
2 anni fa |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
2 anni fa |
|
zhouhr
|
4dc245305f
change ValveType
|
2 anni fa |
|
lixiang
|
3f2b687dbc
1.数据库加入Run Recipe失败数据
|
2 anni fa |
|
zhouhr
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
|
2 anni fa |
|
Intern01
|
171eef8acc
Add to chart@@to slot switch page function
|
2 anni fa |
|
lixiang
|
ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
|
2 anni fa |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
2 anni fa |
 sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
2 anni fa |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 anni fa |
|
zhouhr
|
c71aa92a49
add time on Topview
|
2 anni fa |
|
zhouhr
|
4ed3a26b1b
add Combox Style for TM/LoadLock Operation
|
2 anni fa |
|
zhouhr
|
f11765e064
Add TMHome abort
|
2 anni fa |
|
zhouhr
|
883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
|
2 anni fa |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
2 anni fa |
|
sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 anni fa |
|
zhouhr
|
1e8077cb6e
Add the driver of HongHuVR
|
2 anni fa |
|
lixiang
|
e0817cb012
现场bug修改
|
2 anni fa |
|
zhouhr
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
2 anni fa |
|
sangwq
|
587a0094b4
fix logic error.
|
2 anni fa |
|
sangwq
|
9ba5d70aff
fix abort manual transfer bug.
|
2 anni fa |
|
sangwq
|
2b6f4986f3
fix Efemrobot scheduler bug.
|
2 anni fa |
|
sangwq
|
3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 anni fa |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 anni fa |
|
lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
|
2 anni fa |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
2 anni fa |
|
lixiang
|
a62816fc3f
优化efem
|
2 anni fa |
