sangwq
|
e12c5e5a93
fixed the blocking bug while return wafers.
|
7 mēneši atpakaļ |
sangwq
|
d449c55208
Force Loadlock cooling while return wafer.
|
7 mēneši atpakaļ |
lixiang
|
ca702b093b
1.alarm List 收集到300+条,并添加到程序里
|
7 mēneši atpakaļ |
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
7 mēneši atpakaļ |
sangwq
|
a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
|
7 mēneši atpakaļ |
sangwq
|
a5826caf14
Pre/Post Lot Clean functionality.
|
8 mēneši atpakaļ |
lixiang
|
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
|
8 mēneši atpakaļ |
lixiang
|
bfd7d2def6
手动添加冲突bug 代码
|
8 mēneši atpakaļ |
sangwq
|
87cdf166a0
restore the dispatcher version which been broken by source merge.
|
8 mēneši atpakaļ |
sangwq
|
5b961e44db
fix blocking issue while no wafer waiting in LL.
|
8 mēneši atpakaļ |
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
8 mēneši atpakaļ |
sangwq
|
9e65346638
Fixed the blocking bug after one control job abort and restart.
|
8 mēneši atpakaļ |
sangwq
|
679a0eb967
fix the blocking bug while In loadlock is empty.
|
8 mēneši atpakaļ |
sangwq
|
98cc9d6be7
Fixed the blocking bug after error PM restored.
|
8 mēneši atpakaļ |
sangwq
|
1f85177a1a
Manual return PM wafer function while error happen.
|
8 mēneši atpakaļ |
lixiang
|
b67769ec2c
ui优化
|
8 mēneši atpakaļ |
sangwq
|
0af5bc1e75
throughput enhancement.
|
9 mēneši atpakaļ |
lixiang
|
99d939492e
1.加登出界面
|
9 mēneši atpakaļ |
sangwq
|
af4c050881
refresh throughput on real time with sequential mode.
|
9 mēneši atpakaļ |
sangwq
|
72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
9 mēneši atpakaļ |
sangwq
|
a17bb0b227
keep on enhance throughput.
|
9 mēneši atpakaļ |
sangwq
|
8cb06f14db
fix routing new wafer algorithm bug and add throughput trace log.
|
9 mēneši atpakaļ |
sangwq
|
02266cbd46
optimize routing algorithm.
|
9 mēneši atpakaļ |
sangwq
|
5e8f478558
temporary change avoiding blocking issue.
|
9 mēneši atpakaļ |
sangwq
|
51dd2374a5
temporary change for avoiding blocking issue.
|
9 mēneši atpakaļ |
sangwq
|
67703ea413
enhance routing algorithm.
|
9 mēneši atpakaļ |
sangwq
|
5014ced260
enhance the routing algorithm.
|
9 mēneši atpakaļ |
sangwq
|
c7ca9fa97d
Keep on enhance routing algorithm.
|
9 mēneši atpakaļ |
sangwq
|
6898a40b85
fix a routing bug.
|
9 mēneši atpakaļ |
sangwq
|
970b052f18
keep on enhance throughput.
|
9 mēneši atpakaļ |