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@@ -2138,6 +2138,9 @@ namespace Venus_RT.Modules
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if (atmWaferCount < 2)
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{
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var busyPMs = oderedPMs.Where(pv => pv.Value == 1 && _dictModuleTask[pv.Key].HasWafer).OrderBy(pv => _dictModuleTask[pv.Key].TimeToReady);
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+ if (busyPMs.Count() == 0)
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+ return;
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+
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foreach (var runningJob in runningJobs)
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{
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foreach (var wafer in runningJob.LotWafers)
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@@ -2510,7 +2513,7 @@ namespace Venus_RT.Modules
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var needAlign = _lstProcessJobs.Exists(pj => pj.State == EnumProcessJobState.Processing && IsSequenceNeedAlign(pj.Sequence));
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// return wafer while out LL ready or cooling state
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- if ((outLLWaferStatus.outSlot.Count > 0) && outLLModule.ReayForEfemInTime(10))
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+ if ((outLLWaferStatus.outSlot.Count > 0 && outLLWaferStatus.outSlot.Count <= (validHands - efemRobotWafers.Count)) && outLLModule.ReayForEfemInTime(10))
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{
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if (ExchangeWaferWithLL(outLL))
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return;
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