 zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
zhouhr
|
e8e04e07b5
Change cast way by Enum Name for SEPMView.
|
1 year ago |
|
zhouhr
|
bcbe6b2cbe
fix bug in PM SlitDoorClosed
|
1 year ago |
|
zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 year ago |
|
zhouhr
|
36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
|
1 year ago |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
2 years ago |
|
zhouhr
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 years ago |
