 hecl
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 year ago |
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hecl
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49401d4b6e
1.Fix busgs
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1 year ago |
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hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
 lixiang
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
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hecl
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4c8cdc5b4a
1.Update Venus SE IO
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1 year ago |
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hecl
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dbe33e8d29
Venus DE ui&viewmodel update
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1 year ago |
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hecl
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c188b4cbbc
GasLeakCheckViewModel Update
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1 year ago |
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lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 year ago |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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lixiang
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6a4c179557
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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1 year ago |
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lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
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hecl
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ea59788c5a
Venuse DE routine update &fix config can't hide bugs
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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hecl
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bb939f4cb1
Venus DE he flow update
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1 year ago |
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hecl
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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zhouhr
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5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
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1 year ago |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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hecl
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1b165a2e61
Venus DE update && Venus SE simulator update
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1 year ago |
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hecl
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8d8b960858
Venus DE chamber UI change && Venus SE simulator update
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1 year ago |
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hecl
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7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
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1 year ago |
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zhouhr
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75fc0c642e
update TMROBot,VCE Simulator
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1 year ago |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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hecl
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 year ago |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6f2b23125b
再次提交解决Tolerance bug
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1 year ago |
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lixiang
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8cea3a0063
修复流气tolerance bug
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1 year ago |
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lixiang
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e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
