 zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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1 年之前 |
|
zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 年之前 |
 hecl
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e2836bfbda
1.Chamber DE process enhance
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1 年之前 |
|
hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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1 年之前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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1 年之前 |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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1 年之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 年之前 |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 年之前 |
|
zhouhr
|
273e8dcfae
fix bug in ShareChiller.
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1 年之前 |
|
zhouhr
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 年之前 |
|
hecl
|
9d28f8ee7d
1.Add Tru match
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1 年之前 |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
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1 年之前 |
 lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
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1 年之前 |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
|
1 年之前 |
|
lixiang
|
166a9ab00e
VenusSE UI 打不开bug，配置文件确实Name
|
1 年之前 |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 年之前 |
 sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
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1 年之前 |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 年之前 |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 年之前 |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 年之前 |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 年之前 |
 chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
|
1 年之前 |
|
chenkui
|
587ffe27b5
1、配置文件中增加了FA.Encoding
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1 年之前 |
|
lixiang
|
f09d7d1b15
分开所有系列配置文件
|
1 年之前 |
