 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
 hecl
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58b65c3ff0
VenusSE Simulator PM Update
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2 years ago |
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zhouhr
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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2 years ago |
