 sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
hai 1 ano |
|
sangwq
|
7d93bf0076
Job Clean function, not finished.
|
hai 1 ano |
|
sangwq
|
0a0308458e
Enable drag wafer while module offline.
|
hai 1 ano |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
hai 1 ano |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
hai 1 ano |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
hai 1 ano |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
hai 1 ano |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
hai 1 ano |
 lixiang
|
de406b964e
1.添加EFEM等ui界面
|
hai 1 ano |
|
sangwq
|
b741650da1
TM Cycle ready.
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
dff905345f
增加PMB的兼容
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
44ec74603f
TM Transfer
|
%!s(int64=2) %!d(string=hai) anos |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
%!s(int64=2) %!d(string=hai) anos |
