 lixiang
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a9d8e56970
1.扩展alarm list
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1 year ago |
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lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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1 year ago |
 sangwq
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da0e19a78e
enhance the error handling routine while PM offline.
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1 year ago |
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sangwq
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1d60dcb593
Fix the bugs about Exclude/Include feature.
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1 year ago |
 hecl
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9a410e084a
fix exception:
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1 year ago |
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sangwq
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d9a23a44a2
ChamberType dismatch.
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1 year ago |
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sangwq
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f1d081394f
introduce the chamber type/Temperature to SchedulerPM
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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sangwq
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9189e1b51f
new routing algorithm update.
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1 year ago |
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sangwq
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c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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sangwq
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ec2f97e62d
enhance log.
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1 year ago |
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sangwq
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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2 years ago |
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sangwq
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d1ac5fa823
fixed the clean recipe path bug.
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2 years ago |
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lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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2 years ago |
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sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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2 years ago |
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sangwq
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7d93bf0076
Job Clean function, not finished.
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2 years ago |
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sangwq
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0a0308458e
Enable drag wafer while module offline.
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2 years ago |
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sangwq
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9144014f90
enhance the routing algorithm and module online/offline control logic.
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2 years ago |
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sangwq
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d49b8f65dd
fix the RouteManager instance initialize bug.
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2 years ago |
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sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 years ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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2 years ago |
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sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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sangwq
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b741650da1
TM Cycle ready.
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2 years ago |
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sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
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sangwq
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44ec74603f
TM Transfer
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
