 lixiang
|
5ce110574e
1，添加cooling功能
|
1 gadu atpakaļ |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
1 gadu atpakaļ |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
1 gadu atpakaļ |
 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 gadu atpakaļ |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 gadu atpakaļ |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 gadu atpakaļ |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 gadu atpakaļ |
|
hecl
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
1 gadu atpakaļ |
|
lixiang
|
818383115c
UI优化
|
1 gadu atpakaļ |
 zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 gadu atpakaļ |
|
lixiang
|
ab095ba2a8
修复钟摆阀状态错误bug
|
2 gadi atpakaļ |
|
lixiang
|
0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
|
2 gadi atpakaļ |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
2 gadi atpakaļ |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
2 gadi atpakaļ |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 gadi atpakaļ |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 gadi atpakaļ |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 gadi atpakaļ |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 gadi atpakaļ |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 gadi atpakaļ |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 gadi atpakaļ |
