 lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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1 anno fa |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
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1 anno fa |
 sangwq
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0443cfe386
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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1 anno fa |
|
sangwq
|
39dd3fa41f
Enable Com debug log.
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1 anno fa |
|
lixiang
|
2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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1 anno fa |
|
sangwq
|
2663cfc1d9
Add place/pick delay.
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1 anno fa |
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sangwq
|
9d44ff32a7
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 anno fa |
|
sangwq
|
ed992dd631
Enhance the Log Info
|
1 anno fa |
|
lixiang
|
54ce578158
添加新版本recipe edit界面
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1 anno fa |
|
sangwq
|
b741650da1
TM Cycle ready.
|
2 anni fa |
|
lixiang
|
24fac8d71d
recipe edit新界面制作
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2 anni fa |
|
sangwq
|
dff905345f
增加PMB的兼容
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2 anni fa |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 anni fa |
|
sangwq
|
652afa77f9
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 anni fa |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
2 anni fa |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
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2 anni fa |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
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2 anni fa |
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sangwq
|
44ec74603f
TM Transfer
|
2 anni fa |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
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2 anni fa |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
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2 anni fa |
|
lixiang
|
7299abbcd2
1.优化TM界面
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2 anni fa |
|
sangwq
|
bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
|
2 anni fa |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
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2 anni fa |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 anni fa |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 anni fa |
|
lixiang
|
e867b47d0c
1.添加VAT VATPerformance和PartialPressure界面及数据对比图标
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2 anni fa |
|
sangwq
|
1cb0f9bd5e
missing file.
|
2 anni fa |
|
sangwq
|
e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
|
2 anni fa |
|
lixiang
|
bb33e89998
1，优化UI界面
|
2 anni fa |
|
lixiang
|
f48943cfd1
解决冲突
|
2 anni fa |
