 hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
hecl
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 year ago |
 lixiang
|
818383115c
UI优化
|
1 year ago |
 zhouhr
|
24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
|
1 year ago |
|
lixiang
|
ab095ba2a8
修复钟摆阀状态错误bug
|
1 year ago |
|
lixiang
|
0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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1 year ago |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
|
lixiang
|
8f80478982
1.添加IoSwitch
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
|
847220c6ce
update for initial recipe design
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
