 lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
 Intern01
|
dfc9174ac8
VenusSE TM PM Simulator Update
|
2 years ago |
 sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
2 years ago |
|
lixiang
|
e0817cb012
现场bug修改
|
2 years ago |
 zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
2 years ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
sangwq
|
344d734fff
ATM Transfer.
|
2 years ago |
|
Intern01
|
f845cd22f1
TMInterlock Update
|
2 years ago |
|
Intern01
|
ca4aebf454
LoadLock Left&Right UI Update
|
2 years ago |
|
Intern01
|
6d76a4b7ac
TM IO UPDATE
|
2 years ago |
|
Intern01
|
2950d1e981
TM IO配置更新
|
2 years ago |
|
Intern01
|
265a3b67bc
TMInterlock update
|
2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
2 years ago |
