 hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
 sangwq
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2826cd9348
Enhance the duplicated wafer function.
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1 year ago |
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sangwq
|
2de3872723
duplicated wafer function.
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1 year ago |
 lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 year ago |
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sangwq
|
52349cad2b
Duplicated wafer functions.
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1 year ago |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
|
lixiang
|
4634f3f91a
1。设置log最大500M，超出分文件（解决文件太大，log打不开）
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1 year ago |
|
lixiang
|
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 year ago |
 zhouhr
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ea68c5c25d
add clean for Venus SE.
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1 year ago |
|
lixiang
|
166a9ab00e
VenusSE UI 打不开bug，配置文件确实Name
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1 year ago |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
|
sangwq
|
e8ae7ee302
fix the Loadlock path bug while fixed slot mode.
|
1 year ago |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 year ago |
|
sangwq
|
408e8f0786
enhance the throughput while loadlock is fixed slot pattern.
|
1 year ago |
|
sangwq
|
89d1b63b12
fix the bug which missing calling RouteTo on Vac side.
|
1 year ago |
|
sangwq
|
9cdf232cb1
Fix the routing bug for fixed slot Loadlock.
|
1 year ago |
|
sangwq
|
2a6a20fefc
fix the wrong position for singleArm Option definition while upper in lower out.
|
1 year ago |
|
sangwq
|
746ece5800
restore System.Name configure item
|
1 year ago |
|
zhouhr
|
c3c6427c4d
show names from Gas 9 to Gas 12 in recipe.
|
1 year ago |
|
sangwq
|
b11dfcec1e
Load configure value for Loadlock slot in out option.
|
1 year ago |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
1 year ago |
|
lixiang
|
87f1121180
1.Recipe UI 界面Name优化
|
1 year ago |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
1 year ago |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 year ago |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
hecl
|
ed38ed5c95
1.check load function bugs fix
|
1 year ago |
 chenkui
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
