 lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 anno fa |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 anno fa |
|
lixiang
|
6a4c179557
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
|
1 anno fa |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 anno fa |
 hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
1 anno fa |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 anno fa |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 anno fa |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 anno fa |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 anno fa |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
|
1 anno fa |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 anno fa |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 anno fa |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 anno fa |
|
hecl
|
7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
|
1 anno fa |
|
zhouhr
|
75fc0c642e
update TMROBot,VCE Simulator
|
1 anno fa |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 anno fa |
|
hecl
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
1 anno fa |
|
lixiang
|
feed6f1c8e
修复手动流气bug
|
1 anno fa |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 anno fa |
|
lixiang
|
6f2b23125b
再次提交解决Tolerance bug
|
1 anno fa |
|
lixiang
|
8cea3a0063
修复流气tolerance bug
|
1 anno fa |
|
lixiang
|
e2cd173579
1.添加Kepler2200 流气 Tolerance
|
1 anno fa |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 anno fa |
|
lixiang
|
8b2a01fcc3
kepler2200配置文件也添加IsEnableEthercat
|
1 anno fa |
|
lixiang
|
d744d950e1
配置文件添加Ethercat开关功能
|
1 anno fa |
|
lixiang
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 anno fa |
|
lixiang
|
08ec6feef2
1.优化数据分析界面颜色选择bug
|
1 anno fa |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 anno fa |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 anno fa |
|
hecl
|
db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
|
1 anno fa |
