 hecl
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8b0b067448
Add chamber ISO valve status
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il y a 1 an |
|
hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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il y a 1 an |
 lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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il y a 1 an |
|
hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
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il y a 1 an |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
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il y a 1 an |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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il y a 1 an |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
il y a 1 an |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
il y a 1 an |
|
hecl
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
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il y a 1 an |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
il y a 1 an |
|
lixiang
|
fd2d6f9a5c
解决冲突
|
il y a 1 an |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
|
il y a 1 an |
