 lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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lixiang
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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lixiang
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f62e761ad2
修复小标题efem online/offline报警bug
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6f2b23125b
再次提交解决Tolerance bug
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1 year ago |
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lixiang
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8cea3a0063
修复流气tolerance bug
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1 year ago |
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lixiang
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e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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f8c50b602a
修复Tolerance对流气不开阀的bug
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
 zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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ab095ba2a8
修复钟摆阀状态错误bug
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1 year ago |
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lixiang
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894ff76d5e
online/offline tobview状态颜色变化
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1 year ago |
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lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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1 year ago |
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lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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1 year ago |
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lixiang
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5139f41e19
添加PM Abort 下拉菜单功能
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1 year ago |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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1 year ago |
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lixiang
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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1 year ago |
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lixiang
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20cc441578
1.kepler2200 ui优化
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1 year ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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1 year ago |
