 lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
 hecl
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8b0b067448
Add chamber ISO valve status
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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8cea3a0063
修复流气tolerance bug
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
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1 year ago |
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lixiang
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
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lixiang
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967f6b6b9c
添加控压结束，保持一秒流气功能
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1 year ago |
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lixiang
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f8c50b602a
修复Tolerance对流气不开阀的bug
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1 year ago |
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lixiang
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c3f0679404
UI界面添加Pause/Resume功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
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lixiang
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c457973fa2
1.添加Revtech Match
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1 year ago |
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lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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1 year ago |
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lixiang
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de2f4fea7e
优化abort下拉功能
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1 year ago |
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lixiang
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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1 year ago |
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lixiang
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b1e6a9ce63
bug提交
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1 year ago |
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lixiang
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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1 year ago |
