 hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
 chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
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1 year ago |
 sangwq
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db34e04302
missing SystemDispatcher.cs
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1 year ago |
|
sangwq
|
20606c1ffb
check in new routing algorithm code.
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1 year ago |
 lixiang
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
|
hecl
|
d331213da1
1.SETM Pressure Control update
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1 year ago |
|
hecl
|
e1a8bb6663
1.remove SETM mbar to mtor
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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1 year ago |
|
hecl
|
49401d4b6e
1.Fix busgs
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1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
hecl
|
4c8cdc5b4a
1.Update Venus SE IO
|
1 year ago |
|
hecl
|
dbe33e8d29
Venus DE ui&viewmodel update
|
1 year ago |
|
hecl
|
c188b4cbbc
GasLeakCheckViewModel Update
|
1 year ago |
|
lixiang
|
95f5be1ca4
1.修复iomfc writemode的合并冲突bug
|
1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
lixiang
|
6a4c179557
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Venus
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1 year ago |
|
lixiang
|
e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
|
1 year ago |
|
hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
|
1 year ago |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 year ago |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 year ago |
|
hecl
|
7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
|
1 year ago |
|
zhouhr
|
75fc0c642e
update TMROBot,VCE Simulator
|
1 year ago |
