 lixiang
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6ec37ea42c
1.与Venus分开，删除冗余代码
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6 months ago |
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lixiang
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2cdc13a01b
1.Venus与Kepler 代码分开
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6 months ago |
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lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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7 months ago |
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lixiang
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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7 months ago |
 zhouhr
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82d289e21c
1. add the function of WTWClean by WTWInterval
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7 months ago |
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lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
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lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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8 months ago |
 sangwq
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bcb1461e22
Routing bug while single PM and double arm running.
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9 months ago |
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sangwq
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3a49881f33
fix the typing error.
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9 months ago |
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sangwq
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81e78398e6
enhance the routing algorithm avoid blocking issue while single arm and single PM run.
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9 months ago |
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sangwq
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e12c5e5a93
fixed the blocking bug while return wafers.
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9 months ago |
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sangwq
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d449c55208
Force Loadlock cooling while return wafer.
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10 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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10 months ago |
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lixiang
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d6b8d32004
1.修复不能跑atm模式的bug
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10 months ago |
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sangwq
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a850db5a2d
Enhance the cooling algorithm to avoid processed wafer stay loadlock too long.
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10 months ago |
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sangwq
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a5826caf14
Pre/Post Lot Clean functionality.
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10 months ago |
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lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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10 months ago |
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lixiang
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bfd7d2def6
手动添加冲突bug 代码
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11 months ago |
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sangwq
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87cdf166a0
restore the dispatcher version which been broken by source merge.
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11 months ago |
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sangwq
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5b961e44db
fix blocking issue while no wafer waiting in LL.
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11 months ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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11 months ago |
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sangwq
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9e65346638
Fixed the blocking bug after one control job abort and restart.
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11 months ago |
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sangwq
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679a0eb967
fix the blocking bug while In loadlock is empty.
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11 months ago |
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sangwq
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98cc9d6be7
Fixed the blocking bug after error PM restored.
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11 months ago |
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sangwq
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1f85177a1a
Manual return PM wafer function while error happen.
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11 months ago |
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lixiang
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b67769ec2c
ui优化
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11 months ago |
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sangwq
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0af5bc1e75
throughput enhancement.
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11 months ago |
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lixiang
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99d939492e
1.加登出界面
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11 months ago |
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sangwq
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af4c050881
refresh throughput on real time with sequential mode.
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11 months ago |
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sangwq
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72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
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11 months ago |
