 sangwq
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
1 year ago |
|
sangwq
|
501997ac38
TM/EFEM robot single arm option.
|
2 years ago |
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sangwq
|
9ba5d70aff
fix abort manual transfer bug.
|
2 years ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
2 years ago |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
2 years ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
2 years ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
2 years ago |
|
sangwq
|
6a29fad5f9
update for unload/PMleakcheck bugs
|
2 years ago |
|
sangwq
|
ff17e9c447
develop autycylce/manualmove module.
|
2 years ago |
