 lixiang
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
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lixiang
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52e8bd8f7a
1.优化Home断开重连
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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lixiang
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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feed6f1c8e
修复手动流气bug
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
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2 years ago |
 sangwq
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ec1db1df03
Enhance the Clean/Cycle routine algorithm.
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2 years ago |
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lixiang
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ac251b02cc
1.主界面添加LLA/LLB ATM/VAV显示
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2 years ago |
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lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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2 years ago |
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lixiang
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7a6912dc9c
添加cleanrecipe界面
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2 years ago |
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lixiang
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f53a5428e6
1.将rt向ui传递robot状态放在线程安全队列，避免数据包丢失
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2 years ago |
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lixiang
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5139f41e19
添加PM Abort 下拉菜单功能
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2 years ago |
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lixiang
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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2 years ago |
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lixiang
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edb5ad6960
1.添加数据分析 Recipe step功能
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2 years ago |
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lixiang
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20cc441578
1.kepler2200 ui优化
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2 years ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
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lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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2 years ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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2 years ago |
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lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
 Intern01
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987f0abae5
1.Slove TuroN2Flow don't show problem
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2 years ago |
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lixiang
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9c46c55950
解决冲突
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2 years ago |
