 lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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il y a 1 an |
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lixiang
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8b2a01fcc3
kepler2200配置文件也添加IsEnableEthercat
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il y a 1 an |
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lixiang
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d744d950e1
配置文件添加Ethercat开关功能
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il y a 1 an |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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il y a 1 an |
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lixiang
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08ec6feef2
1.优化数据分析界面颜色选择bug
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il y a 1 an |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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il y a 1 an |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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il y a 1 an |
 hecl
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db7e4fc9d5
PMProcessRoutine naming conventions & Lot id record adjustment
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il y a 1 an |
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hecl
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2aa8eecc79
Enhancement of PMProcessRoutine recipe processing flow
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il y a 1 an |
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lixiang
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fd2d6f9a5c
解决冲突
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il y a 1 an |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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il y a 1 an |
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hecl
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fa67219b9f
1.Add automatically update database column codes
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il y a 1 an |
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hecl
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56d9a355a8
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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il y a 1 an |
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hecl
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091efd8f64
1.enhance PMdataRecord about waferstatus update
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il y a 1 an |
 zhouhr
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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hecl
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eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
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il y a 1 an |
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zhouhr
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57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
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il y a 1 an |
 sangwq
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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il y a 1 an |
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hecl
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e2c4a51efe
1.Add VenusDE JetVenusDEPM control
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il y a 1 an |
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sangwq
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b71003a42d
Fix the increasing aligner angle out of range bug.
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il y a 1 an |
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sangwq
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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il y a 1 an |
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zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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il y a 1 an |
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lixiang
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020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
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il y a 1 an |
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lixiang
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fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
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il y a 1 an |
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lixiang
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d8b75084d0
添加RT UI 模块选择功能
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il y a 1 an |
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lixiang
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34bdc228de
Datalog添加高温Heater温度显示
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il y a 1 an |
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lixiang
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15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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il y a 1 an |
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lixiang
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f8026cadbc
控压结束动作bug修复
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il y a 1 an |
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lixiang
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967f6b6b9c
添加控压结束，保持一秒流气功能
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il y a 1 an |
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lixiang
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022b366a65
分页功能bug修复
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il y a 1 an |
