 zhouhr
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afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
 hecl
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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vor 11 Monaten |
 sangwq
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75b6c4548e
submit new venus routing algorithm.
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vor 11 Monaten |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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vor 11 Monaten |
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hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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vor 1 Jahr |
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zhouhr
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ea68c5c25d
add clean for Venus SE.
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vor 1 Jahr |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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vor 1 Jahr |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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vor 1 Jahr |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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vor 1 Jahr |
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zhouhr
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9d9b666ea4
Venus SE Update
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vor 1 Jahr |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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vor 1 Jahr |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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vor 1 Jahr |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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vor 1 Jahr |
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zhouhr
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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vor 1 Jahr |
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zhouhr
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376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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vor 1 Jahr |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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vor 1 Jahr |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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vor 1 Jahr |
