 lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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il y a 11 mois |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
il y a 11 mois |
|
lixiang
|
d33079596b
1.优化新版跑片动画
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il y a 11 mois |
|
lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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il y a 1 an |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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il y a 1 an |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
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il y a 1 an |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
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il y a 1 an |
|
lixiang
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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il y a 1 an |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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il y a 1 an |
 Intern01
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b7129c8da5
PM&Simulator update
|
il y a 1 an |
|
lixiang
|
f9a02a739a
添加pmc/kepler2200
|
il y a 1 an |
