 Intern01
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b1f52bbe8a
Simulator PMC update
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1 year ago |
 lixiang
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72ac29dac2
1.优化PMC Kepler2200A界面
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1 year ago |
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lixiang
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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1 year ago |
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lixiang
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b96ac701fb
1.添加TM Simulator
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1 year ago |
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lixiang
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4ffafb6001
EFEM界面优化
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1 year ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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546436c2c7
模拟器读取chamber bug修改
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2 years ago |
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lixiang
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e52d3832a4
模拟器chamber选择由手动改动变为都rt配置文件
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2 years ago |
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lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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lixiang
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8f80478982
1.添加IoSwitch
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
 sangwq
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dff905345f
增加PMB的兼容
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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39fe214261
1.完善PartialPressure 功能
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2 years ago |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 years ago |
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lixiang
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
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2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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ccb4444fa8
添加部分ui按钮控制rt功能
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2 years ago |
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sangwq
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2b930e56b9
Log output for exception.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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lixiang
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782eafc783
1.添加log配置文件功能
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2 years ago |
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sangwq
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9760d40cf7
port simulator
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2 years ago |
