 zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
 lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
|
lixiang
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caba8d94c6
Duplicated Wafer UI显示
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1 year ago |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
|
lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
|
hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 year ago |
|
lixiang
|
f62e761ad2
修复小标题efem online/offline报警bug
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1 year ago |
|
lixiang
|
c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 year ago |
|
lixiang
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e3ab321150
添加TM IO界面
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1 year ago |
|
lixiang
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0f905564d0
加入登录界面和权限管理
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1 year ago |
|
lixiang
|
af631c4aaa
1.添加RF Calibration功能
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
|
lixiang
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
|
zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
|
lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
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1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
5e8bf0ff14
1.重绘window窗体
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1 year ago |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
|
zhouhr
|
cc3f68a0f1
enhance the check in MoveWafer
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1 year ago |
|
zhouhr
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5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
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1 year ago |
|
hecl
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78c80a0896
fix bugs
|
2 years ago |
|
lixiang
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
2 years ago |
|
hecl
|
7e0a676b69
Improve datalog performance
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2 years ago |
|
hecl
|
8e5ec35137
Add tansfer checkpage add fix bug about show step
|
2 years ago |
|
zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
|
zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 years ago |
|
lixiang
|
5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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2 years ago |
 Intern01
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e2dc10679e
Solve conflict
|
2 years ago |
|
Intern01
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33f3e3a72e
1.complete parameters writing in pm routine
|
2 years ago |
